Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884564 | Fluorinated polymers having ester groups and photoresists for microlithography | Andrew Edward Feiring, Jerald Feldman, Frank Leonard Schadt, III | 2005-04-26 |
| 6858379 | Photoresist compositions for short wavelength imaging | Anthony Zampini, Charles R. Szmanda, James F. Cameron, Gerhard Pohlers | 2005-02-22 |
| 6852466 | Photoresist compositions particularly suitable for short wavelength imaging | Peter Trefonas, III | 2005-02-08 |