Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899995 | Protecting groups in polymers, photoresists and processes for microlithography | Viacheslav A. Petrov, Frank Leonard Schadt, III | 2005-05-31 |
| 6884564 | Fluorinated polymers having ester groups and photoresists for microlithography | Jerald Feldman, Frank Leonard Schadt, III, Gary N. Taylor | 2005-04-26 |
| 6875555 | Preparation and use of EXO-2-fluoroalkyl(bicyclo[2.2.1] hept-5-enes) | Viacheslav A. Petrov, Frank Leonard Schadt, III | 2005-04-05 |
| 6855370 | Fluoropolymer interlayer dielectric by chemical vapor deposition | Michael T. Mocella, Theodore A. Treat, Yakov Brichko, Eugene Lopata, Peter Rose | 2005-02-15 |
| 6849377 | Photoresists, polymers and processes for microlithography | Frank Leonard Schadt, III | 2005-02-01 |