Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974657 | Compositions for microlithography | Larry Berger, Michael Karl Crawford, Lynda Kaye Johnson, Frank Leonard Schadt, III, Fredrick Claus Zumsteg, Jr. | 2005-12-13 |
| 6884564 | Fluorinated polymers having ester groups and photoresists for microlithography | Andrew Edward Feiring, Frank Leonard Schadt, III, Gary N. Taylor | 2005-04-26 |