Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974657 | Compositions for microlithography | Larry Berger, Michael Karl Crawford, Jerald Feldman, Lynda Kaye Johnson, Fredrick Claus Zumsteg, Jr. | 2005-12-13 |
| 6951705 | Polymers for photoresist compositions for microlithography | Michael Fryd, Periyasamy Mookkan | 2005-10-04 |
| 6899995 | Protecting groups in polymers, photoresists and processes for microlithography | Andrew Edward Feiring, Viacheslav A. Petrov | 2005-05-31 |
| 6884564 | Fluorinated polymers having ester groups and photoresists for microlithography | Andrew Edward Feiring, Jerald Feldman, Gary N. Taylor | 2005-04-26 |
| 6884562 | Photoresists and processes for microlithography | Michael Fryd, Mookkan Periyasamy | 2005-04-26 |
| 6875555 | Preparation and use of EXO-2-fluoroalkyl(bicyclo[2.2.1] hept-5-enes) | Andrew Edward Feiring, Viacheslav A. Petrov | 2005-04-05 |
| 6872503 | Copolymers for photoresists and processes therefor | Robert Clayton Wheland, Roger Harquail French, Frederick C. Zumsteg, Jr. | 2005-03-29 |
| 6849377 | Photoresists, polymers and processes for microlithography | Andrew Edward Feiring | 2005-02-01 |