Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962767 | Acetal compound, polymer, resist composition and patterning process | Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2005-11-08 |
| 6916593 | Resist composition | Jun Hatakeyama, Youichi Ohsawa | 2005-07-12 |
| 6899990 | Epoxy compound having alicyclic structure, polymer, resist composition and patterning process | Koji Hasegawa, Takeshi Kinsho, Tsunehiro Nishi | 2005-05-31 |