Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962767 | Acetal compound, polymer, resist composition and patterning process | Takeru Watanabe, Takeshi Kinsho, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2005-11-08 |
| 6899990 | Epoxy compound having alicyclic structure, polymer, resist composition and patterning process | Takeshi Kinsho, Takeru Watanabe, Tsunehiro Nishi | 2005-05-31 |
| 6844133 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Takeshi Kinsho | 2005-01-18 |