Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962767 | Acetal compound, polymer, resist composition and patterning process | Takeru Watanabe, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2005-11-08 |
| 6946233 | Polymer, resist material and patterning method | Tsunehiro Nishi | 2005-09-20 |
| 6899990 | Epoxy compound having alicyclic structure, polymer, resist composition and patterning process | Koji Hasegawa, Takeru Watanabe, Tsunehiro Nishi | 2005-05-31 |
| 6844133 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Koji Hasegawa | 2005-01-18 |