Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916591 | Photoacid generators, chemically amplified resist compositions, and patterning process | Katsuhiro Kobayashi, Katsuya Takemura, Junji Tsuchiya, Kazunori Maeda | 2005-07-12 |
| 6916593 | Resist composition | Jun Hatakeyama, Takeru Watanabe | 2005-07-12 |
| 6838224 | Chemical amplification, positive resist compositions | Jun Watanabe, Takanobu Takeda, Akihiro Seki | 2005-01-04 |