Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949323 | Resist composition and patterning process | Osamu Watanabe, Kazunori Maeda, Hiroshi Miyakoshi | 2005-09-27 |
| 6919161 | Silicon-containing polymer, resist composition and patterning process | Jun Hatakeyama, Toshinobu Ishihara | 2005-07-19 |
| 6902772 | Silicon-containing polymer, resist composition and patterning process | Jun Hatakeyama, Toshinobu Ishihara | 2005-06-07 |
| 6869748 | Resist composition and patterning process | Osamu Watanabe | 2005-03-22 |
| 6861198 | Negative resist material and pattern formation method using the same | Osamu Watanabe, Wataru Kusaki, Ryuji Koitabashi | 2005-03-01 |
| 6838224 | Chemical amplification, positive resist compositions | Youichi Ohsawa, Jun Watanabe, Akihiro Seki | 2005-01-04 |