Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919161 | Silicon-containing polymer, resist composition and patterning process | Jun Hatakeyama, Takanobu Takeda | 2005-07-19 |
| 6902772 | Silicon-containing polymer, resist composition and patterning process | Takanobu Takeda, Jun Hatakeyama | 2005-06-07 |