Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6860801 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Kyung-Dae Kim, Hyung-Sik Hong, Min Gyu Kim | 2005-03-01 |