Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924072 | Method for exposing a peripheral area of a wafer and apparatus for performing the same | Dong-Wha Shin, Byung Ho Min, Jae Hong Choi | 2005-08-02 |
| 6903336 | Polarity exchanger and ion implanter having the same | Gyeong-Su Keum, Gum-Hyun Shin, Kyue-sang Choi, Chung-Hun Park | 2005-06-07 |
| 6860801 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Yun-Sik Yang, Kyung-Dae Kim, Min Gyu Kim | 2005-03-01 |
| 6858854 | Method and apparatus for measuring inclination angle of ion beam | Gyeong-Su Keum, Jae-Im Yun, Chung-Hun Park, Wan-Goo Hwang | 2005-02-22 |