Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6863770 | Method and apparatus for polishing a substrate while washing a polishing pad of the apparatus with at least one free-flowing vertical stream of liquid | Man-Ho Jae | 2005-03-08 |
| 6860801 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Yun-Sik Yang, Kyung-Dae Kim, Hyung-Sik Hong | 2005-03-01 |