Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6898007 | Microscope for inspecting semiconductor wafer | Jai-Young Woo, Jin-Sung Kim, Young Goo Lee | 2005-05-24 |
| 6860801 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Yun-Sik Yang, Hyung-Sik Hong, Min Gyu Kim | 2005-03-01 |