Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953741 | Methods of fabricating contacts for semiconductor devices utilizing a pre-flow process | Eun-Ae Chung, Beom-jun Jim | 2005-10-11 |
| 6858529 | Methods of forming contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus | Eun-Ae Chung, Young-Pil Kim, Jin-Gyun Kim, Bean-Jun Jin | 2005-02-22 |
| 6849555 | Wafer processing apparatus and wafer processing method using the same | Jong-Myeong Lee, Byung-Hee Kim, Ju-Young Yun, Gil-Heyun Choi | 2005-02-01 |