Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933495 | 3-grid neutral beam source used for etching semiconductor device | Do-Haing Lee, Byoung Jae Park | 2005-08-23 |
| 6926799 | Etching apparatus using neutral beam | Do-Haing Lee, Min-jae Chung | 2005-08-09 |
| 6874443 | Layer-by-layer etching apparatus using neutral beam and etching method using the same | Min-jae Chung, Do-Haing Lee, Sung Min Cho, Sae-hoon Chung | 2005-04-05 |