Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6926799 | Etching apparatus using neutral beam | Geun-Young Yeom, Do-Haing Lee | 2005-08-09 |
| 6874443 | Layer-by-layer etching apparatus using neutral beam and etching method using the same | Geun-Young Yeom, Do-Haing Lee, Sung Min Cho, Sae-hoon Chung | 2005-04-05 |