Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6874443 | Layer-by-layer etching apparatus using neutral beam and etching method using the same | Geun-Young Yeom, Min-jae Chung, Do-Haing Lee, Sung Min Cho | 2005-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6874443 | Layer-by-layer etching apparatus using neutral beam and etching method using the same | Geun-Young Yeom, Min-jae Chung, Do-Haing Lee, Sung Min Cho | 2005-04-05 |