Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933495 | 3-grid neutral beam source used for etching semiconductor device | Geun-Young Yeom, Do-Haing Lee | 2005-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933495 | 3-grid neutral beam source used for etching semiconductor device | Geun-Young Yeom, Do-Haing Lee | 2005-08-23 |