Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936831 | Divided reticles for charged-particle-beam microlithography apparatus, and methods for using same | Noriyuki Hirayanagi, Kazuaki Suzuki, Teruaki Okino | 2005-08-30 |
| 6917048 | Methods and devices for controlling blur resulting from the space-charge effect and geometrical aberration in a charged-particle-beam microlithography apparatus | Kazuaki Suzuki | 2005-07-12 |