Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936831 | Divided reticles for charged-particle-beam microlithography apparatus, and methods for using same | Tomoharu Fujiwara, Noriyuki Hirayanagi, Teruaki Okino | 2005-08-30 |
| 6917048 | Methods and devices for controlling blur resulting from the space-charge effect and geometrical aberration in a charged-particle-beam microlithography apparatus | Tomoharu Fujiwara | 2005-07-12 |
| 6879258 | IC card having a mica film for stable resonance frequency and enhanced antenna properties | Nobukazu Kuroda | 2005-04-12 |