Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936831 | Divided reticles for charged-particle-beam microlithography apparatus, and methods for using same | Tomoharu Fujiwara, Noriyuki Hirayanagi, Kazuaki Suzuki | 2005-08-30 |
| 6894291 | Apparatus and methods for blocking highly scattered charged particles in a patterned beam in a charged-particle-beam microlithography system | Shintaro Kawata | 2005-05-17 |