Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979920 | Circulation housing for a mover | Ed Reynolds, Andrew J. Hazelton | 2005-12-27 |
| 6963821 | Stage counter mass system | W. Thomas Novak, Toshio Ueta, Bausan Yuan | 2005-11-08 |
| 6956308 | Dual flow circulation system for a mover | — | 2005-10-18 |
| 6927505 | Following stage planar motor | Bausan Yuan | 2005-08-09 |
| 6844694 | Stage assembly and exposure apparatus including the same | — | 2005-01-18 |
| 6842226 | Flexure supported wafer table | Douglas C. Watson | 2005-01-11 |