Issued Patents 2005
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953109 | Vibration isolator with low lateral stiffness | Alton H. Phillips | 2005-10-11 |
| 6937911 | Compensating for cable drag forces in high precision stages | — | 2005-08-30 |
| 6927838 | Multiple stage, stage assembly having independent stage bases | Kazuya Ono, Andrew J. Hazelton | 2005-08-09 |
| 6922293 | Kinematic optical mounting assembly with flexures | Alton H. Phillips, Masato Hatasawa | 2005-07-26 |
| 6903346 | Stage assembly having a follower assembly | Michael Sogard, Michael Kovalerchik | 2005-06-07 |
| 6888620 | System and method for holding a device with minimal deformation | Martin E. Lee, Mike Binnard | 2005-05-03 |
| 6882126 | Holder mover for a stage assembly | Mike Binnard, Andrew J. Hazelton, Martin E. Lee | 2005-04-19 |
| 6880942 | Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system | Andrew J. Hazelton, W. Thomas Novak, Alton H. Phillips | 2005-04-19 |
| 6873478 | Kinematic lens mount with reduced clamping force | — | 2005-03-29 |
| 6840638 | Deformable mirror with passive and active actuators | — | 2005-01-11 |
| 6842277 | Deformable mirror with high-bandwidth servo for rigid body control | — | 2005-01-11 |
| 6842226 | Flexure supported wafer table | Michael Binnard | 2005-01-11 |