Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927840 | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device | — | 2005-08-09 |
| 6888620 | System and method for holding a device with minimal deformation | Mike Binnard, Douglas C. Watson | 2005-05-03 |
| 6882126 | Holder mover for a stage assembly | Douglas C. Watson, Mike Binnard, Andrew J. Hazelton | 2005-04-19 |
| 6872958 | Platform positioning system | Gerry B. Andeen, N. William Parker, S. Daniel Miller | 2005-03-29 |
| 6841965 | Guideless stage with isolated reaction stage | — | 2005-01-11 |