Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977375 | Multi-beam multi-column electron beam inspection system | Edward Yin, Alan D. Brodie, Frank Tsai | 2005-12-20 |
| 6943351 | Multi-column charged particle optics assembly | S. Daniel Miller, Victor A. Galande | 2005-09-13 |
| 6872958 | Platform positioning system | Gerry B. Andeen, Martin E. Lee, S. Daniel Miller | 2005-03-29 |
| 6844550 | Multi-beam multi-column electron beam inspection system | Edward Yin, Alan D. Brodie, Frank Tsai | 2005-01-18 |