Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980279 | Interferometer system for measuring a height of wafer stage | — | 2005-12-27 |
| 6963821 | Stage counter mass system | Michael Binnard, Toshio Ueta, Bausan Yuan | 2005-11-08 |
| 6880942 | Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system | Andrew J. Hazelton, Alton H. Phillips, Douglas C. Watson | 2005-04-19 |