Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6963821 | Stage counter mass system | Michael Binnard, W. Thomas Novak, Toshio Ueta | 2005-11-08 |
| 6927505 | Following stage planar motor | Michael Binnard | 2005-08-09 |
| 6855032 | Fine force control of actuators for chemical mechanical polishing apparatuses | Pai-Hsueh Yang | 2005-02-15 |