Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6917412 | Modular stage with reaction force cancellation | Alex Ka Tim Poon, Leonard Wai Fung Kho, Ping-Wei Chang | 2005-07-12 |
| 6855032 | Fine force control of actuators for chemical mechanical polishing apparatuses | Bausan Yuan | 2005-02-15 |