Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970255 | Encoder measurement based on layer thickness | Blaine R. Spady, Weidong Yang, Roger R. Lowe-Webb | 2005-11-29 |
| 6958819 | Encoder with an alignment target | Weidong Yang, Roger R. Lowe-Webb | 2005-10-25 |
| 6910847 | Precision polar coordinate stage | Christopher W. Blaufus, Blaine R. Spady, Dan M. Colban | 2005-06-28 |