Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970255 | Encoder measurement based on layer thickness | Blaine R. Spady, John D. Heaton, Weidong Yang | 2005-11-29 |
| 6958819 | Encoder with an alignment target | John D. Heaton, Weidong Yang | 2005-10-25 |
| 6949462 | Measuring an alignment target with multiple polarization states | Weidong Yang | 2005-09-27 |