Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970255 | Encoder measurement based on layer thickness | John D. Heaton, Weidong Yang, Roger R. Lowe-Webb | 2005-11-29 |
| 6910847 | Precision polar coordinate stage | Christopher W. Blaufus, John D. Heaton, Dan M. Colban | 2005-06-28 |
| 6854948 | Stage with two substrate buffer station | Dan M. Colban, Robert S. Kearns | 2005-02-15 |