Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6910847 | Precision polar coordinate stage | Christopher W. Blaufus, Blaine R. Spady, John D. Heaton | 2005-06-28 |
| 6854948 | Stage with two substrate buffer station | Blaine R. Spady, Robert S. Kearns | 2005-02-15 |