Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902771 | Process for producing silica-based film, silica-based film, insulating film, and semiconductor device | Kouji Sumiya | 2005-06-07 |
| 6890605 | Method of film formation, insulating film, and substrate for semiconductor | Michinori Nishikawa, Manabu Sekiguchi, Matthias Patz, Mutsuhiko Yoshioka, Kinji Yamada | 2005-05-10 |