Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890605 | Method of film formation, insulating film, and substrate for semiconductor | Michinori Nishikawa, Manabu Sekiguchi, Matthias Patz, Mutsuhiko Yoshioka, Atsushi Shiota | 2005-05-10 |
| 6884862 | Polymer, process for production, composition for film formation containing the same, method of film formation, and insulating film | Takashi Okada, Noriyasu Sinohara, Kaori Shirato, Masahiko Ebisawa, Michinori Nishikawa | 2005-04-26 |
| 6852370 | Composition for film formation and material for insulating film formation | Noriyasu Shinohara, Kaori Shirato, Michinori Nishikawa, Takashi Okada | 2005-02-08 |