Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890605 | Method of film formation, insulating film, and substrate for semiconductor | Michinori Nishikawa, Manabu Sekiguchi, Matthias Patz, Atsushi Shiota, Kinji Yamada | 2005-05-10 |