Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902771 | Process for producing silica-based film, silica-based film, insulating film, and semiconductor device | Atsushi Shiota | 2005-06-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902771 | Process for producing silica-based film, silica-based film, insulating film, and semiconductor device | Atsushi Shiota | 2005-06-07 |