Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919269 | Production method for a semiconductor component | Manfred Schneegans, Wolfgang Jager, Ulrike Bewersdorff-Sarlette | 2005-07-19 |
| 6897155 | Method for etching high-aspect-ratio features | Ajay Kumar, Anisul Khan, Dragan Podlesnik, Sharma Pamarthy, Axel Henke +1 more | 2005-05-24 |