Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979652 | Etching multi-shaped openings in silicon | Sharma Pamarthy, Sanjay Thekdi, Ajay Kumar | 2005-12-27 |
| 6954561 | Methods for forming thermo-optic switches, routers and attenuators | Ajay Kumar | 2005-10-11 |
| 6905616 | Method of releasing devices from a substrate | Ajay Kumar, Sanjay Thekdi, Sharma Pamarthy | 2005-06-14 |
| 6897155 | Method for etching high-aspect-ratio features | Ajay Kumar, Dragan Podlesnik, Sharma Pamarthy, Axel Henke, Stephan Wege +1 more | 2005-05-24 |