Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979652 | Etching multi-shaped openings in silicon | Anisul Khan, Sanjay Thekdi, Ajay Kumar | 2005-12-27 |
| 6905616 | Method of releasing devices from a substrate | Ajay Kumar, Anisul Khan, Sanjay Thekdi | 2005-06-14 |
| 6897155 | Method for etching high-aspect-ratio features | Ajay Kumar, Anisul Khan, Dragan Podlesnik, Axel Henke, Stephan Wege +1 more | 2005-05-24 |