Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897155 | Method for etching high-aspect-ratio features | Ajay Kumar, Anisul Khan, Dragan Podlesnik, Sharma Pamarthy, Stephan Wege +1 more | 2005-05-24 |
AH
Axel Henke
Overall (2005): #233,814 of 245,428Top 100%
1
Patents 2005