Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899784 | Apparatus for detecting CMP endpoint in acidic slurries | Leping Li, Scott R. Cline, James Albert Gilhooly, Walter Imfeld, Werner Moser +4 more | 2005-05-31 |
| 6878629 | Method for detecting CMP endpoint in acidic slurries | Leping Li, Scott R. Cline, James Albert Gilhooly, Xinhui Wang, Cong Wei | 2005-04-12 |
| 6858532 | Low defect pre-emitter and pre-base oxide etch for bipolar transistors and related tooling | Wesley C. Natzle, David C. Ahlgren, Marc W. Cantell, Basanth Jagannathan, Louis D. Lanzerotti +2 more | 2005-02-22 |
| 6843880 | Enhanced endpoint detection for wet etch process control | Leping Li | 2005-01-18 |