Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899784 | Apparatus for detecting CMP endpoint in acidic slurries | Steven G. Barbee, Scott R. Cline, James Albert Gilhooly, Walter Imfeld, Werner Moser +4 more | 2005-05-31 |
| 6878629 | Method for detecting CMP endpoint in acidic slurries | Steven G. Barbee, Scott R. Cline, James Albert Gilhooly, Xinhui Wang, Cong Wei | 2005-04-12 |
| 6843880 | Enhanced endpoint detection for wet etch process control | Steven G. Barbee | 2005-01-18 |