Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899784 | Apparatus for detecting CMP endpoint in acidic slurries | Leping Li, Steven G. Barbee, Scott R. Cline, James Albert Gilhooly, Walter Imfeld +4 more | 2005-05-31 |
| 6878629 | Method for detecting CMP endpoint in acidic slurries | Leping Li, Steven G. Barbee, Scott R. Cline, James Albert Gilhooly, Xinhui Wang | 2005-04-12 |