Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838347 | Method for reducing line edge roughness of oxide material using chemical oxide removal | Wesley C. Natzle, Richard S. Wise, Hongwen Yan, Bidan Zhang | 2005-01-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838347 | Method for reducing line edge roughness of oxide material using chemical oxide removal | Wesley C. Natzle, Richard S. Wise, Hongwen Yan, Bidan Zhang | 2005-01-04 |