Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930060 | Method for forming a uniform distribution of nitrogen in silicon oxynitride gate dielectric | Michael P. Chudzik, Toshiharu Furukawa, Oleg Gluschenkov, Paul Kirsch, Kristen Scheer +1 more | 2005-08-16 |