Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946064 | Sample mount for performing sputter-deposition in a focused ion beam (FIB) tool | Lawrence Fischer, Steven B. Herschbein | 2005-09-20 |
| 6900137 | Dry etch process to edit copper lines | Steven B. Herschbein, Ville S. Kiiskinen, Carmelo F. Scrudato, Michael Sievers | 2005-05-31 |
| 6843893 | Metal dry etch using electronic field | Steven B. Herschbein, Herschel M. Marchman, Michael Sievers | 2005-01-18 |