Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843893 | Metal dry etch using electronic field | Steven B. Herschbein, Chad Rue, Michael Sievers | 2005-01-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843893 | Metal dry etch using electronic field | Steven B. Herschbein, Chad Rue, Michael Sievers | 2005-01-18 |