Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911283 | Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism | Gregory P. Hughes, Franklin D. Kalk, Hakki Ufuk Alpay, Glenn E. Storm | 2005-06-28 |
| 6894766 | Method for constructing a photomask assembly using an encoded mark | Craig West, Glenn E. Storm, Susan S. MacDonald, James Carroll | 2005-05-17 |
| 6841309 | Damage resistant photomask construction | H. Ufuk Alpay, Gregory P. Hughes, Franklin D. Kalk | 2005-01-11 |