Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6894766 | Method for constructing a photomask assembly using an encoded mark | Glenn E. Storm, Susan S. MacDonald, Joseph Gordon, James Carroll | 2005-05-17 |
| 6850858 | Method and apparatus for calibrating a metrology tool | Gregory P. Hughes, Kent B. Ibsen | 2005-02-01 |